dc.contributor.author | Schaekers, Marc | |
dc.contributor.author | De Jaeger, Brice | |
dc.contributor.author | Sleeckx, Erik | |
dc.contributor.author | Debusschere, Ingrid | |
dc.contributor.author | Van Hove, Marleen | |
dc.contributor.author | Lauwers, A. | |
dc.contributor.author | Hauf, H. | |
dc.date.accessioned | 2021-10-14T17:45:53Z | |
dc.date.available | 2021-10-14T17:45:53Z | |
dc.date.issued | 2001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5633 | |
dc.source | IIOimport | |
dc.title | A low thermal budget pre metal dielectric stack using PECVD and HDP processing | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Schaekers, Marc | |
dc.contributor.imecauthor | De Jaeger, Brice | |
dc.contributor.imecauthor | Sleeckx, Erik | |
dc.contributor.imecauthor | Debusschere, Ingrid | |
dc.contributor.orcidimec | Schaekers, Marc::0000-0002-1496-7816 | |
dc.contributor.orcidimec | De Jaeger, Brice::0000-0001-8804-7556 | |
dc.contributor.orcidimec | Sleeckx, Erik::0000-0003-2560-6132 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | 7th International Dielectrics & Conductors for ULSI Multilevel Interconnection Conference (DCMIC) and Exhibition | |
dc.source.conferencedate | 5/03/2001 | |
dc.source.conferencelocation | | |
imec.availability | Published - open access | |