Authors

Sedky, Sherif; Witvrouw, Ann; Saerens, Annelies; Van Houtte, P.; Poortmans, Jef; Baert, Kris

Issue

9

Journal

Journal of Materials Research

Volume

16

Title

Effect of in situ boron doping on properties of silicon germanium films deposited by chemical vapor deposition at 400 degrees C

Publication type

Journal article