Publication:

Modification of low-k SiCOH film porosity by a HF solution

Date

2001

Proceedings Paper

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Files

5675.pdf 234.11 KB

Author(s)

Shamiryan, Denis

;

Baklanov, Mikhaïl

;

;

Vanhaelemeersch, Serge

;

Statistics

1858 since deposited on 2021-10-14

Acq. date: 2026-02-24