Controllable change of porosity of 3-methylsilane low-k dielectric film

Metadata

Show full item record

Authors

Shamiryan, Denis; Baklanov, Mikhaïl; Vanhaelemeersch, Serge; Maex, Karen

Issue

1

Journal

Electrochemical and Solid-State Letters

Volume

4

Title

Controllable change of porosity of 3-methylsilane low-k dielectric film

Publication type

Journal article

Collections

Articles