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Electrical characterization of shallow cobalt-silicided junctions

dc.contributor.authorSimoen, Eddy
dc.contributor.authorPoyai, Amporn
dc.contributor.authorClaeys, Cor
dc.contributor.authorLukyanchikova, N.
dc.contributor.authorPetrichuk, M.
dc.contributor.authorGarbar, N.
dc.contributor.authorCzerwinski, A.
dc.contributor.authorKatcki, J.
dc.contributor.authorRatajczak, J.
dc.contributor.authorGaubas, Eugenijus
dc.date.accessioned2021-10-14T17:51:41Z
dc.date.available2021-10-14T17:51:41Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5666
dc.sourceIIOimport
dc.titleElectrical characterization of shallow cobalt-silicided junctions
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.beginpage207
dc.source.endpage10
dc.source.journalJournal of Materials Science: Materials in Electronics
dc.source.issue4_6
dc.source.volume12
imec.availabilityPublished - imec


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