Electrical characterization of shallow cobalt-silicided junctions

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Authors

Simoen, Eddy; Poyai, Amporn; Claeys, Cor; Lukyanchikova, N.; Petrichuk, M.; Garbar, N.; Czerwinski, A.; Katcki, J.; Ratajczak, J.; Gaubas, Eugenijus

Issue

4_6

Journal

Journal of Materials Science: Materials in Electronics

Volume

12

Title

Electrical characterization of shallow cobalt-silicided junctions

Publication type

Journal article

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