Publication:
Electrical characterization of shallow cobalt-silicided junctions
Date
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Poyai, Amporn | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.author | Lukyanchikova, N. | |
| dc.contributor.author | Petrichuk, M. | |
| dc.contributor.author | Garbar, N. | |
| dc.contributor.author | Czerwinski, A. | |
| dc.contributor.author | Katcki, J. | |
| dc.contributor.author | Ratajczak, J. | |
| dc.contributor.author | Gaubas, Eugenijus | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-14T17:51:41Z | |
| dc.date.available | 2021-10-14T17:51:41Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5666 | |
| dc.source.beginpage | 207 | |
| dc.source.endpage | 10 | |
| dc.source.issue | 4_6 | |
| dc.source.journal | Journal of Materials Science: Materials in Electronics | |
| dc.source.volume | 12 | |
| dc.title | Electrical characterization of shallow cobalt-silicided junctions | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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