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Electrical characterization of shallow cobalt-silicided junctions
Publication:
Electrical characterization of shallow cobalt-silicided junctions
Date
2001
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Simoen, Eddy
;
Poyai, Amporn
;
Claeys, Cor
;
Lukyanchikova, N.
;
Petrichuk, M.
;
Garbar, N.
;
Czerwinski, A.
;
Katcki, J.
;
Ratajczak, J.
;
Gaubas, Eugenijus
Journal
Journal of Materials Science: Materials in Electronics
Abstract
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Views
1978
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1978
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations