dc.contributor.author | Stuer, Cindy | |
dc.contributor.author | Steegen, An | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Van Landuyt, J. | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-14T17:55:25Z | |
dc.date.available | 2021-10-14T17:55:25Z | |
dc.date.issued | 2001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5687 | |
dc.source | IIOimport | |
dc.title | Characterisation of the local stress in CoSi2 silicided shallow trench isolation structures | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.imecauthor | Maex, Karen | |
dc.source.peerreview | no | |
dc.source.beginpage | 481 | |
dc.source.endpage | 484 | |
dc.source.conference | Microscopy of Semiconducting Materials - MSMXII | |
dc.source.conferencedate | 25/03/2001 | |
dc.source.conferencelocation | Oxford UK | |
imec.availability | Published - imec | |
imec.internalnotes | IOP Conference Series; Vol. 169 | |