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In situ transmission electron microscopy study of Ni silicide phases formed on (001) Si active lines

dc.contributor.authorTeodorescu, V.
dc.contributor.authorNistor, Leona
dc.contributor.authorBender, Hugo
dc.contributor.authorSteegen, An
dc.contributor.authorLauwers, A.
dc.contributor.authorMaex, Karen
dc.contributor.authorVan Landuyt, J.
dc.date.accessioned2021-10-14T17:58:09Z
dc.date.available2021-10-14T17:58:09Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5702
dc.sourceIIOimport
dc.titleIn situ transmission electron microscopy study of Ni silicide phases formed on (001) Si active lines
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage167
dc.source.endpage174
dc.source.journalJournal of Applied Physics
dc.source.issue1
dc.source.volume90
imec.availabilityPublished - imec


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