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In situ transmission electron microscopy study of Ni silicide phases formed on (001) Si active lines
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In situ transmission electron microscopy study of Ni silicide phases formed on (001) Si active lines
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Date
2001
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Teodorescu, V.
;
Nistor, Leona
;
Bender, Hugo
;
Steegen, An
;
Lauwers, A.
;
Maex, Karen
;
Van Landuyt, J.
Journal
Journal of Applied Physics
Abstract
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1942
since deposited on 2021-10-14
1
last month
Acq. date: 2026-01-10
Citations
Metrics
Views
1942
since deposited on 2021-10-14
1
last month
Acq. date: 2026-01-10
Citations