| dc.contributor.author | Tilmans, Harrie | |
| dc.date.accessioned | 2021-10-14T17:59:49Z | |
| dc.date.available | 2021-10-14T17:59:49Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5711 | |
| dc.source | IIOimport | |
| dc.title | MEMS for wireless communications (RF-MEMS) | |
| dc.type | Oral presentation | |
| dc.contributor.imecauthor | Tilmans, Harrie | |
| dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
| dc.source.peerreview | no | |
| dc.source.conference | 2nd Workshop on Semiconductor Sensor and Actuator Technology; November 30, 2001; Veldhoven, The Netherlands. | |
| dc.source.conferencelocation | | |
| imec.availability | Published - imec | |
