Improved LOCOS isolation for ultra thin 0.18 μm fully-depleted SOI CMOS
dc.contributor.author | van Meer, Hans | |
dc.contributor.author | De Meyer, Kristin | |
dc.date.accessioned | 2021-10-14T18:05:44Z | |
dc.date.available | 2021-10-14T18:05:44Z | |
dc.date.issued | 2001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5742 | |
dc.source | IIOimport | |
dc.title | Improved LOCOS isolation for ultra thin 0.18 μm fully-depleted SOI CMOS | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | De Meyer, Kristin | |
dc.source.peerreview | no | |
dc.source.beginpage | 301 | |
dc.source.endpage | 306 | |
dc.source.conference | Proceedings 10th International Symposium on Silicon-on-Insulator Technology and Devices; 26 March 2001; Washington, D.C., USA. | |
dc.source.conferencelocation | ||
imec.availability | Published - imec |
Files in this item
Files | Size | Format | View |
---|---|---|---|
There are no files associated with this item. |