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High-speed 3D optical imaging and failure analysis of high- and low-frequency movements in micro-electro-mechanical (MEMS) with nanometer resolution

dc.contributor.authorvan Spengen, Merlijn
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorPuers, Bob
dc.date.accessioned2021-10-14T18:08:29Z
dc.date.available2021-10-14T18:08:29Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5757
dc.sourceIIOimport
dc.titleHigh-speed 3D optical imaging and failure analysis of high- and low-frequency movements in micro-electro-mechanical (MEMS) with nanometer resolution
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorPuers, Bob
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage268
dc.source.endpage277
dc.source.conferenceReliability, Testing, and Characterization of MEMS/MOEMS
dc.source.conferencelocation
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 4558


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