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Germanium devices: hybrid integration and substrate removal

dc.contributor.authorVandersmissen, Raf
dc.contributor.authorvan der Zanden, Koen
dc.contributor.authorSchreurs, Dominique
dc.contributor.authorBorghs, Gustaaf
dc.date.accessioned2021-10-14T18:11:41Z
dc.date.available2021-10-14T18:11:41Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5774
dc.sourceIIOimport
dc.titleGermanium devices: hybrid integration and substrate removal
dc.typeProceedings paper
dc.contributor.imecauthorSchreurs, Dominique
dc.contributor.imecauthorBorghs, Gustaaf
dc.source.peerreviewno
dc.source.beginpage85
dc.source.endpage88
dc.source.conferenceGaAs MANTECH Conference. Digest of Papers; 21-24 May 2001; Las Vegas, NV, USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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