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Thin (2-4nm) medium and high-k dielectrica: a challenge for physical metrology

dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T18:12:45Z
dc.date.available2021-10-14T18:12:45Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5780
dc.sourceIIOimport
dc.titleThin (2-4nm) medium and high-k dielectrica: a challenge for physical metrology
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conference31st European Solid-State Device Research Conference; 11-13 Sept. 2001; Nuremberg, Germany.
dc.source.conferencelocation
imec.availabilityPublished - imec


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