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Nm-scale characterization of deep submicron devices using scanning probes

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDuhayon, Natasja
dc.contributor.authorEyben, Pierre
dc.contributor.authorXu, Mingwei
dc.contributor.authorClarysse, Trudo
dc.date.accessioned2021-10-14T18:12:57Z
dc.date.available2021-10-14T18:12:57Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5781
dc.sourceIIOimport
dc.titleNm-scale characterization of deep submicron devices using scanning probes
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorDuhayon, Natasja
dc.contributor.imecauthorEyben, Pierre
dc.source.peerreviewno
dc.source.conferenceConference on Microscopy; 28 March 2001; Oxford, UK.
dc.source.conferencelocation
imec.availabilityPublished - imec


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