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Towards routine, quantitative two-dimensional carrier profiling with scanning spreading resistance microscopy

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorEyben, Pierre
dc.contributor.authorCallewaert, Sven
dc.date.accessioned2021-10-14T18:13:08Z
dc.date.available2021-10-14T18:13:08Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5782
dc.sourceIIOimport
dc.titleTowards routine, quantitative two-dimensional carrier profiling with scanning spreading resistance microscopy
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorEyben, Pierre
dc.source.peerreviewno
dc.source.beginpage613
dc.source.endpage619
dc.source.conferenceCharacterization and Metrology for ULSI Technology 2000: International Conference; Gaithersburg, Maryland, 26-29 June 2000.
dc.source.conferencelocation
imec.availabilityPublished - imec


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