Nanometer scale carrier profiling with scanning probes

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Authors
Vandervorst, Wilfried; Eyben, Pierre; Duhayon, Natasja; Hantschel, Thomas; Xu, Mingwei; Clarysse, Trudo
Conference
7th Microscopy of Semiconductor Materials Conference; 2001; Oxford, UK.
Title
Nanometer scale carrier profiling with scanning probes
Publication type
Oral presentation
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