Suppression of rare-earth implantation-induced damage in GaN

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Authors

Vantomme, Andre; Hogg, S. M.; Wu, Ming Fang; Pipeleers, B.; Swart, M.; Goodman, S.; Auret, D.; Iakoubovskii, K.; Adriaenssens, G. J.; Jacobs, Koen; Moerman, Ingrid

Journal

Nuclear Instruments & Methods in Physics Research Section B

Volume

175-177

Title

Suppression of rare-earth implantation-induced damage in GaN

Publication type

Journal article

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