Suppression of rare-earth implantation-induced damage in GaN

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Author(s)

Vantomme, Andre

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Iakoubovskii, K.

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Adriaenssens, G. J.

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Moerman, Ingrid

Journal

Nuclear Instruments & Methods in Physics Research Section B

Metrics

2043 since deposited on 2021-10-14

2last month

Acq. date: 2025-12-08