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Suppression of rare-earth implantation-induced damage in GaN

dc.contributor.authorVantomme, Andre
dc.contributor.authorHogg, S. M.
dc.contributor.authorWu, Ming Fang
dc.contributor.authorPipeleers, B.
dc.contributor.authorSwart, M.
dc.contributor.authorGoodman, S.
dc.contributor.authorAuret, D.
dc.contributor.authorIakoubovskii, K.
dc.contributor.authorAdriaenssens, G. J.
dc.contributor.authorJacobs, Koen
dc.contributor.authorMoerman, Ingrid
dc.date.accessioned2021-10-14T18:16:46Z
dc.date.available2021-10-14T18:16:46Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5800
dc.sourceIIOimport
dc.titleSuppression of rare-earth implantation-induced damage in GaN
dc.typeJournal article
dc.contributor.imecauthorVantomme, Andre
dc.contributor.imecauthorMoerman, Ingrid
dc.contributor.orcidimecMoerman, Ingrid::0000-0003-2377-3674
dc.source.peerreviewno
dc.source.beginpage148
dc.source.endpage153
dc.source.journalNuclear Instruments & Methods in Physics Research Section B
dc.source.volume175-177
imec.availabilityPublished - imec


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