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The origins of fluorine in dry ultrathin silicon oxides
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Authors
Vereecke, Guy
;
Röhr, Erika
;
Carter, Richard
;
Conard, Thierry
;
De Witte, Hilde
;
Heyns, Marc
Conference
Ultra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS
Title
The origins of fluorine in dry ultrathin silicon oxides
Publication type
Proceedings paper
Embargo date
9999-12-31
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