Publication:

The origins of fluorine in dry ultrathin silicon oxides

Date

2001

Proceedings Paper

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Files

5839.pdf 224.08 KB

Author(s)

;

;

Carter, Richard

;

Conard, Thierry

;

De Witte, Hilde

;

Statistics

1790 since deposited on 2021-10-14

Acq. date: 2026-02-26