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Optimization of a brush scrubber for nano-particles

dc.contributor.authorXu, Kaidong
dc.contributor.authorVos, Rita
dc.contributor.authorArnauts, Sophia
dc.contributor.authorSchaetzlein, W.
dc.contributor.authorSpeh, U.
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-14T18:26:43Z
dc.date.available2021-10-14T18:26:43Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5848
dc.sourceIIOimport
dc.titleOptimization of a brush scrubber for nano-particles
dc.typeMeeting abstract
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorArnauts, Sophia
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.source.peerreviewno
dc.source.conference200th International Meeting Electrochemical Society: 7th International Symposium on Cleaning Technology in Semiconductor Device
dc.source.conferencedate2/09/2001
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesAbstract 1421


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