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The role of hydrogen in hole trap generation in oxides and oxynitrides

dc.contributor.authorZhang, Wenqi
dc.contributor.authorSii, H. K.
dc.contributor.authorChen, A. H.
dc.contributor.authorZhao, Chao
dc.contributor.authorUren, M. J.
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorDegraeve, Robin
dc.date.accessioned2021-10-14T18:31:28Z
dc.date.available2021-10-14T18:31:28Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5871
dc.sourceIIOimport
dc.titleThe role of hydrogen in hole trap generation in oxides and oxynitrides
dc.typeOral presentation
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDegraeve, Robin
dc.source.peerreviewno
dc.source.conferenceSISC-Conference; December 2001; Washington, D.C.
dc.source.conferencelocation
imec.availabilityPublished - imec


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