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Crystallization and tetragonal-monoclinic transformation in ZrO2 and HfO2 dielectric thin films

dc.contributor.authorZhao, Chao
dc.contributor.authorRoebben, G.
dc.contributor.authorHeyns, Marc
dc.contributor.authorVan der Biest, O.
dc.date.accessioned2021-10-14T18:33:13Z
dc.date.available2021-10-14T18:33:13Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5879
dc.sourceIIOimport
dc.titleCrystallization and tetragonal-monoclinic transformation in ZrO2 and HfO2 dielectric thin films
dc.typeOral presentation
dc.contributor.imecauthorHeyns, Marc
dc.source.peerreviewno
dc.source.conference7th European Ceramic Society; 9-13 September 2001; Brugge, Belgium.
dc.source.conferencelocation
imec.availabilityPublished - imec


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