2025 IEEE 37TH INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES, ICMTS
Abstract
Volatile organic compound sensors continue to face challenges in achieving key requirements for their practical use. In this context, metal-organic framework functionalized field-effect transistors hold great potential as game-changers in gas sensing, however, they are prone to baseline drift as many other gas sensing technologies. To address this issue, we integrated a microheater to facilitate degassing of residual gases. The thermal distribution of the microheater was evaluated by using temperature-sensing test structures. Additionally, the importance of the metal-organic framework as an enabler for methanol sensing was demonstrated. The influence of temperature pulses on the intrinsic characteristics of the a-IGZO channel was further addressed, showing a reversible de-trapping of electrons. By applying heating pulses of 100°C from the integrated microheater, the baseline drift caused by residual methanol was successfully corrected.
