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Automated assembly of holder chips to AFM probes

dc.contributor.authorReinhart, Gunther
dc.contributor.authorJacob, Dirk
dc.contributor.authorFouchier, Marc
dc.date.accessioned2021-10-14T18:36:57Z
dc.date.available2021-10-14T18:36:57Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5897
dc.sourceIIOimport
dc.titleAutomated assembly of holder chips to AFM probes
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage310
dc.source.endpage317
dc.source.conferenceMicrorobotics and Microassembly III
dc.source.conferencedate29/10/2001
dc.source.conferencelocationNewton, MA USA
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 4568


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