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FE material and integration issues for FeRAM-embedding advanced CMOS processes

dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-14T18:42:17Z
dc.date.available2021-10-14T18:42:17Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5923
dc.sourceIIOimport
dc.titleFE material and integration issues for FeRAM-embedding advanced CMOS processes
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage25
dc.source.endpage26
dc.source.conference1st International Meeting on Ferroelectric Random Access Memories - FeRAM
dc.source.conferencedate19/11/2001
dc.source.conferencelocationGotemba Japan
imec.availabilityPublished - open access


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