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Scanning spreading resistance microscopy of fully depleted SOI devices

dc.contributor.authorAlvarez, David
dc.contributor.authorHartwich, J.
dc.contributor.authorKretz, J.
dc.contributor.authorFouchier, Marc
dc.date.accessioned2021-10-14T21:07:06Z
dc.date.available2021-10-14T21:07:06Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5948
dc.sourceIIOimport
dc.titleScanning spreading resistance microscopy of fully depleted SOI devices
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceMicro- and Nano-Engineering - MNE
dc.source.conferencedate17/09/2002
dc.source.conferencelocationLugano Switzerland
imec.availabilityPublished - imec


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