Controlling STI-related parasitic conduction in 90nm CMOS and below

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Authors
Augendre, Emmanuel; Rooyackers, Rita; Shamiryan, Denis; Ravit, Claire; Jurczak, Gosia; Badenes, Gonçal
Conference
ESSDERC - 32nd European Solid-State Device Research Conference
Title
Controlling STI-related parasitic conduction in 90nm CMOS and below
Publication type
Proceedings paper
Embargo date
9999-12-31
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