Wafer-scale integration of lithium niobate on a silicon photonics 200-mm platform

Abstract

We demonstrate a scalable approach for integrating lithium niobate onto silicon photonics using wafer-scale micro-transfer printing, enabling high-speed modulators with a 3.8 V half-wave voltage and over 70 GHz bandwidth. As proof of concept, over 200 lithium niobate structures were integrated on a 200−mm wafer.