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Properties of mesoporous low-k MSSQ based film prepared using macromolecular porogen

dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorJehoul, Christiane
dc.contributor.authorFlannery, C. M.
dc.contributor.authorMoguilnikov, Konstantin
dc.contributor.authorGore, R.
dc.contributor.authorGronbeck, D.
dc.contributor.authorProkopowicz, G.
dc.contributor.authorSullivan, C.
dc.contributor.authorYou, Y.
dc.contributor.authorPugliano, N.
dc.contributor.authorGallagher, M.
dc.date.accessioned2021-10-14T21:07:54Z
dc.date.available2021-10-14T21:07:54Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5985
dc.sourceIIOimport
dc.titleProperties of mesoporous low-k MSSQ based film prepared using macromolecular porogen
dc.typeProceedings paper
dc.contributor.imecauthorJehoul, Christiane
dc.source.peerreviewno
dc.source.beginpage273
dc.source.endpage278
dc.source.conferenceAdvanced Metallization Conference 2001
dc.source.conferencedate9/10/2001
dc.source.conferencelocationMontreal Canada
imec.availabilityPublished - imec
imec.internalnotesConference Proceedings ULSI XVII


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