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Determination of critical characteristics of low-k films by ellipsometric porosimetry

dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorMoguilnikov, Konstantin
dc.date.accessioned2021-10-14T21:07:57Z
dc.date.available2021-10-14T21:07:57Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5987
dc.sourceIIOimport
dc.titleDetermination of critical characteristics of low-k films by ellipsometric porosimetry
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.conferenceInternational SEMATECH Ultra Low-k Workshop
dc.source.conferencedate6/06/2002
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesCD-ROM Proceedings


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