Browsing Presentations by author "Palov, A."
Now showing items 1-2 of 2
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Interaction of atomic fluorine with porous low-k SiCOH films: modeling
Palov, A.; Voronina, E.; Lopaev, D.; Mankelevich, Y.; Rakhimova, T.; Zyryanov, S.; Proshina, O.; Baklanov, Mikhaïl (2015) -
Low-k OSG damage and etching by F atoms at lowered temperatures
Zyryanov, S.; Kurchikov, D.; Lopaev, D.; Mankelevich, Y.; Palov, A.; Rakhimova, T.; Voronina, E.; Novikova, N.; Baklanov, Mikhaïl (2015)