Browsing Presentations by author "Nakashima, A."
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Non-destructive determination of pore size distribution of low-k porous SOG films
Baklanov, Mikhaïl; Kondoh, Eiichi; Gidley, D.; Lin, E.; Wu, Wen; Arao, H.; Mogilnikov, K. P.; Shamiryan, Denis; Nakashima, A. (2000)