Browsing Presentations by imec author "359db30d30f2f3a9a42def151b78b6dffe53df74"
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Edge shape control for bonded wafer
Inoue, Fumihiro; Jourdain, Anne; Peng, Lan; Phommahaxay, Alain; De Wolf, Ingrid; Rebibis, Kenneth June; Miller, Andy; Sleeckx, Erik; Beyne, Eric (2017) -
Influence of contact area on oxide-oxide fusion bonding quality between 200mm quartz and silicon wafers
Buja, Federico; Humbert, Aurelie; Visker, Jakob; Peng, Lan (2017)