Publication:
Influence of contact area on oxide-oxide fusion bonding quality between 200mm quartz and silicon wafers
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1928 since deposited on 2021-10-24
4last month
Acq. date: 2026-08-19
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Statistics
Views
1928 since deposited on 2021-10-24
4last month
Acq. date: 2026-08-19
Citations