Browsing Presentations by imec author "3f81bb8435638b43491445553f7f545838f45af0"
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Contact hole CD uniformity repair through directed self-assembly of cylindrical phase block copolymers
Gronheid, Roel; Singh, Arjun; Chan, BT; Rincon Delgadillo, Paulina; Nealey, Paul; Younkin, Todd; Romo Negreira, Ainhoa; Somervell, Mark; Tahara, Shigeru; Nafus, Kathleen (2012) -
High density aligned CNT Arrays
Cott, Daire; Vereecken, Philippe; Romo Negreira, Ainhoa; Esconjauregui, Santiago Cruz; Griffiths, Hefin; Groeseneken, Guido (2007)