Authors

Gronheid, Roel; Singh, Arjun; Chan, BT; Rincon Delgadillo, Paulina; Nealey, Paul; Younkin, Todd; Romo Negreira, Ainhoa; Somervell, Mark; Tahara, Shigeru; Nafus, Kathleen

Conference

MRS Fall M eeting Symposium S: Directed Self-Assembly for Nanopatterning

Title

Contact hole CD uniformity repair through directed self-assembly of cylindrical phase block copolymers

Publication type

Oral presentation