Publication:

Contact hole CD uniformity repair through directed self-assembly of cylindrical phase block copolymers

Date

2012
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorGronheid, Roel
dc.contributor.authorSingh, Arjun
dc.contributor.authorChan, BT
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorNealey, Paul
dc.contributor.authorYounkin, Todd
dc.contributor.authorRomo Negreira, Ainhoa
dc.contributor.authorSomervell, Mark
dc.contributor.authorTahara, Shigeru
dc.contributor.authorNafus, Kathleen
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorSingh, Arjun
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorRomo Negreira, Ainhoa
dc.contributor.imecauthorNafus, Kathleen
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.accessioned2021-10-20T11:21:44Z
dc.date.available2021-10-20T11:21:44Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20758
dc.source.conferenceMRS Fall M eeting Symposium S: Directed Self-Assembly for Nanopatterning
dc.source.conferencedate26/11/2012
dc.source.conferencelocationBoston, MA USA
dc.title

Contact hole CD uniformity repair through directed self-assembly of cylindrical phase block copolymers

dc.typeOral presentation
dspace.entity.typePublication
Files
Publication available in collections:
Presentations