Browsing Presentations by author "Ohashi, Takeyoshi"
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Precise measurement of thin film thickness in 3D-NAND device with CD-SEM
Ohashi, Takeyoshi; Atsuko, Yamaguchi; Kobayashi, Takashi; Inoue, Osamu; Hasumi, Kazuhisa; Ikota, Masami; Tan, Chi Lim; Van den Bosch, Geert; Lorusso, Gian; Furnemont, Arnaud (2016) -
SEM Inspection of Nanowire Devices: Contact inspection, Resistance and Capacitance Measurement and Buckling Evaluation
Ohashi, Takeyoshi; Hasumi, Kazuhisa; Masami, Ikota; Lorusso, Gian; Mertens, Hans; Witters, Liesbeth; Horiguchi, Naoto (2019)