Browsing Presentations by author "Pacco, Antoine"
Now showing items 1-2 of 2
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Low temperature pre-epi treatment: critical parameters to control interface contamination
Loo, Roger; Hikavyy, Andriy; Leys, Frederik; Wada, Masayuki; Sano, Ken-Ichi; De Vos, Brecht; Pacco, Antoine; Bargallo Gonzalez, Mireia; Simoen, Eddy; Verheyen, Peter; Vanherle, Wendy; Caymax, Matty (2008) -
Wet defect etching for defect reveal in epitaxial Ge
Pacco, Antoine; Schulze, Andreas; Caymax, Matty; Holsteyns, Frank; De Gendt, Stefan; De Keyzer, Ellen (2015)