Low temperature pre-epi treatment: critical parameters to control interface contamination

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Authors
Loo, Roger; Hikavyy, Andriy; Leys, Frederik; Wada, Masayuki; Sano, Ken-Ichi; De Vos, Brecht; Pacco, Antoine; Bargallo Gonzalez, Mireia; Simoen, Eddy; Verheyen, Peter; Vanherle, Wendy; Caymax, Matty
Conference
9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS
Title
Low temperature pre-epi treatment: critical parameters to control interface contamination
Publication type
Oral presentation
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