Browsing Presentations by imec author "6ce67832ebd7b6d74ab32135d721d18b54b6c26a"
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Plasma etch challenges and processing optimization in spin logic device fabrication
Canvel, Yann; Souriau, Laurent; Wan, Danny; Trovato, Anna; Thiam, Arame; Tsvetanova, Diana; Carpenter, Robert; Raymenants, Eline; Asselberghs, Inge; Lazzarino, Frederic; Couet, Sebastien; Kar, Gouri Sankar; Nguyen, Van Dai (2022-11-08)