Browsing Presentations by author "Naito, Yasuyuki"
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Torsional mode MEMS resonator using thin film vacuum package
Onishi, K.; Naito, Yasuyuki; Yamakawa, T.; Nakamura, K.; Helin, Philippe; De Coster, Jeroen; Haspeslagh, Luc; Tilmans, Harrie (2012)