Browsing Presentations by imec author "72d5d3dd0db98659eb215fb7f433f1958d1050d1"
Now showing items 1-3 of 3
-
Minimizing particle contamination of NXE3100 reticles
Jonckheere, Rik; Baudemprez, Bart; Waehler, Tobias; Van Den Heuvel, Dieter; Schmalfuss, Heiko; Brux, Oliver; Dress, Peter; Kappel, Christophe; Zickler, Leander (2012) -
Resist process development for the EUV alpha demo tool at IMEC
Goethals, Mieke; Niroomand, Ardavan; Van Roey, Frieda; Hermans, Jan; Lorusso, Gian; Baudemprez, Bart; Pollentier, Ivan; de Marneffe, Jean-Francois; Demuynck, Steven; Jonckheere, Rik; Ronse, Kurt (2008) -
Shadowing effect compensation
Lorusso, Gian; Kim, Insung; Baudemprez, Bart; Myers, Alan; Hermans, Jan; Jonckheere, Rik; Goethals, Mieke; Ronse, Kurt (2007)