Browsing Presentations by imec author "813f94a69406dccfc22948fd8122300b49e243b3"
Now showing items 1-3 of 3
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Fundamental analysis of the collapse of nano-patterns during wet-processing of advanced interconnects
Zahedmanesh, Houman; Le, Quoc Toan; Vanstreels, Kris; Gonzalez, Mario; Tokei, Zsolt (2017) -
Mechanical stability of advanced nano-interconnects
Vanstreels, Kris; Zahedmanesh, Houman; Gonzalez, Mario (2020) -
Optical testing of EUV pellicle materials
Pollentier, Ivan; Vanpaemel, Johannes; Zahedmanesh, Houman; Adelmann, Christoph; Huyghebaert, Cedric; Gallagher, Emily; Brose, Sasha; Danylyuk, Serhij; Bergmann, Klaus (2015)