Browsing Presentations by imec author "d7def1b15f53a593f09366e363742982201d61cf"
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Impact of "terminal effect" on Cu plating: options and roadmap
Armini, Silvia; Tokei, Zsolt; Volders, Henny; El-Mekki, Zaid; Radisic, Alex; Beyer, Gerald; Ruythooren, Wouter; Vereecken, Philippe (2010) -
"Terminal effect" on Cu electrochemical deposition: options and roadmap
Armini, Silvia; Tokei, Zsolt; Volders, Henny; El-Mekki, Zaid; Radisic, Alex; Beyer, Gerald; Ruythooren, Wouter; Vereecken, Philippe (2010)