Impact of "terminal effect" on Cu plating: options and roadmap

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Authors
Armini, Silvia; Tokei, Zsolt; Volders, Henny; El-Mekki, Zaid; Radisic, Alex; Beyer, Gerald; Ruythooren, Wouter; Vereecken, Philippe
Conference
Materials for Advanced Metallization Conference
Title
Impact of "terminal effect" on Cu plating: options and roadmap
Publication type
Oral presentation
Embargo date
9999-12-31
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