Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Presentations
Impact of "terminal effect" on Cu plating: options and roadmap
Publication:
Impact of "terminal effect" on Cu plating: options and roadmap
Copy permalink
Date
2010
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
20391.pdf
159.07 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Armini, Silvia
;
Tokei, Zsolt
;
Volders, Henny
;
El-Mekki, Zaid
;
Radisic, Alex
;
Beyer, Gerald
;
Ruythooren, Wouter
;
Vereecken, Philippe
Journal
Abstract
Description
Metrics
Views
1935
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-15
Citations
Metrics
Views
1935
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-15
Citations